RIFTA: A Robust Iterative Fourier Transform-based dwell time Algorithm for ultra-precision ion beam figuring of synchrotron mirrors

With the rapid evolution of synchrotron X-ray sources, the demand for high-precision X-ray mirrors has greatly increased. Single nanometer profile error is required to keep imaging capability at the diffraction limit. Ion Beam Figuring (IBF), as a highly deterministic surfacing technique, has been u...

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Detalles Bibliográficos
Autores principales: Wang, Tianyi, Huang, Lei, Kang, Hyukmo, Choi, Heejoo, Kim, Dae Wook, Tayabaly, Kashmira, Idir, Mourad
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7235036/
https://www.ncbi.nlm.nih.gov/pubmed/32424222
http://dx.doi.org/10.1038/s41598-020-64923-3

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7235036/
https://www.ncbi.nlm.nih.gov/pubmed/32424222
http://dx.doi.org/10.1038/s41598-020-64923-3

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