PECVD of Hexamethyldisiloxane Coatings Using Extremely Asymmetric Capacitive RF Discharge

An extremely asymmetric low-pressure discharge was used to study the composition of thin films prepared by PECVD using HMDSO as a precursor. The metallic chamber was grounded, while the powered electrode was connected to an RF generator. The ratio between the surface area of the powered and grounded...

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Detalles Bibliográficos
Autores principales: Gosar, Žiga, Kovač, Janez, Đonlagić, Denis, Pevec, Simon, Primc, Gregor, Junkar, Ita, Vesel, Alenka, Zaplotnik, Rok
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7254392/
https://www.ncbi.nlm.nih.gov/pubmed/32384729
http://dx.doi.org/10.3390/ma13092147

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7254392/
https://www.ncbi.nlm.nih.gov/pubmed/32384729
http://dx.doi.org/10.3390/ma13092147

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