Gas-Phase Chemical Reaction Mechanism in the Growth of AlN during High-Temperature MOCVD: A Thermodynamic Study

[Image: see text] We presented a comprehensive thermodynamic study of the gas-phase chemical reaction mechanism of the AlN growth by high-temperature metal-organic chemical vapor deposition, investigating the addition reactions, pyrolysis reactions, and polymerization of amide DMANH(2) and subsequen...

Descripción completa

Detalles Bibliográficos
Autores principales: An, Jiadai, Dai, Xianying, Zhang, Qian, Guo, Runqiu, Feng, Lansheng
Formato: Online Artículo Texto
Lenguaje:English
Publicado: American Chemical Society 2020
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7254806/
https://www.ncbi.nlm.nih.gov/pubmed/32478270
http://dx.doi.org/10.1021/acsomega.0c01180

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7254806/
https://www.ncbi.nlm.nih.gov/pubmed/32478270
http://dx.doi.org/10.1021/acsomega.0c01180

Ejemplares similares