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Gas-Phase Chemical Reaction Mechanism in the Growth of AlN during High-Temperature MOCVD: A Thermodynamic Study

[Image: see text] We presented a comprehensive thermodynamic study of the gas-phase chemical reaction mechanism of the AlN growth by high-temperature metal-organic chemical vapor deposition, investigating the addition reactions, pyrolysis reactions, and polymerization of amide DMANH(2) and subsequen...

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Detalles Bibliográficos
Autores principales:	An, Jiadai, Dai, Xianying, Zhang, Qian, Guo, Runqiu, Feng, Lansheng
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	American Chemical Society 2020
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7254806/ https://www.ncbi.nlm.nih.gov/pubmed/32478270 http://dx.doi.org/10.1021/acsomega.0c01180

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