Direct Write of 3D Nanoscale Mesh Objects with Platinum Precursor via Focused Helium Ion Beam Induced Deposition

The next generation optical, electronic, biological, and sensing devices as well as platforms will inevitably extend their architecture into the 3rd dimension to enhance functionality. In focused ion beam induced deposition (FIBID), a helium gas field ion source can be used with an organometallic pr...

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Detalles Bibliográficos
Autores principales: Belianinov, Alex, Burch, Matthew J., Ievlev, Anton, Kim, Songkil, Stanford, Michael G., Mahady, Kyle, Lewis, Brett B., Fowlkes, Jason D., Rack, Philip D., Ovchinnikova, Olga S.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7281202/
https://www.ncbi.nlm.nih.gov/pubmed/32455865
http://dx.doi.org/10.3390/mi11050527

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7281202/
https://www.ncbi.nlm.nih.gov/pubmed/32455865
http://dx.doi.org/10.3390/mi11050527

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