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Direct Write of 3D Nanoscale Mesh Objects with Platinum Precursor via Focused Helium Ion Beam Induced Deposition
The next generation optical, electronic, biological, and sensing devices as well as platforms will inevitably extend their architecture into the 3rd dimension to enhance functionality. In focused ion beam induced deposition (FIBID), a helium gas field ion source can be used with an organometallic pr...
Autores principales: | , , , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2020
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7281202/ https://www.ncbi.nlm.nih.gov/pubmed/32455865 http://dx.doi.org/10.3390/mi11050527 |
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author | Belianinov, Alex Burch, Matthew J. Ievlev, Anton Kim, Songkil Stanford, Michael G. Mahady, Kyle Lewis, Brett B. Fowlkes, Jason D. Rack, Philip D. Ovchinnikova, Olga S. |
author_facet | Belianinov, Alex Burch, Matthew J. Ievlev, Anton Kim, Songkil Stanford, Michael G. Mahady, Kyle Lewis, Brett B. Fowlkes, Jason D. Rack, Philip D. Ovchinnikova, Olga S. |
author_sort | Belianinov, Alex |
collection | PubMed |
description | The next generation optical, electronic, biological, and sensing devices as well as platforms will inevitably extend their architecture into the 3rd dimension to enhance functionality. In focused ion beam induced deposition (FIBID), a helium gas field ion source can be used with an organometallic precursor gas to fabricate nanoscale structures in 3D with high-precision and smaller critical dimensions than focused electron beam induced deposition (FEBID), traditional liquid metal source FIBID, or other additive manufacturing technology. In this work, we report the effect of beam current, dwell time, and pixel pitch on the resultant segment and angle growth for nanoscale 3D mesh objects. We note subtle beam heating effects, which impact the segment angle and the feature size. Additionally, we investigate the competition of material deposition and sputtering during the 3D FIBID process, with helium ion microscopy experiments and Monte Carlo simulations. Our results show complex 3D mesh structures measuring ~300 nm in the largest dimension, with individual features as small as 16 nm at full width half maximum (FWHM). These assemblies can be completed in minutes, with the underlying fabrication technology compatible with existing lithographic techniques, suggesting a higher-throughput pathway to integrating FIBID with established nanofabrication techniques. |
format | Online Article Text |
id | pubmed-7281202 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2020 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-72812022020-06-15 Direct Write of 3D Nanoscale Mesh Objects with Platinum Precursor via Focused Helium Ion Beam Induced Deposition Belianinov, Alex Burch, Matthew J. Ievlev, Anton Kim, Songkil Stanford, Michael G. Mahady, Kyle Lewis, Brett B. Fowlkes, Jason D. Rack, Philip D. Ovchinnikova, Olga S. Micromachines (Basel) Article The next generation optical, electronic, biological, and sensing devices as well as platforms will inevitably extend their architecture into the 3rd dimension to enhance functionality. In focused ion beam induced deposition (FIBID), a helium gas field ion source can be used with an organometallic precursor gas to fabricate nanoscale structures in 3D with high-precision and smaller critical dimensions than focused electron beam induced deposition (FEBID), traditional liquid metal source FIBID, or other additive manufacturing technology. In this work, we report the effect of beam current, dwell time, and pixel pitch on the resultant segment and angle growth for nanoscale 3D mesh objects. We note subtle beam heating effects, which impact the segment angle and the feature size. Additionally, we investigate the competition of material deposition and sputtering during the 3D FIBID process, with helium ion microscopy experiments and Monte Carlo simulations. Our results show complex 3D mesh structures measuring ~300 nm in the largest dimension, with individual features as small as 16 nm at full width half maximum (FWHM). These assemblies can be completed in minutes, with the underlying fabrication technology compatible with existing lithographic techniques, suggesting a higher-throughput pathway to integrating FIBID with established nanofabrication techniques. MDPI 2020-05-22 /pmc/articles/PMC7281202/ /pubmed/32455865 http://dx.doi.org/10.3390/mi11050527 Text en © 2020 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Article Belianinov, Alex Burch, Matthew J. Ievlev, Anton Kim, Songkil Stanford, Michael G. Mahady, Kyle Lewis, Brett B. Fowlkes, Jason D. Rack, Philip D. Ovchinnikova, Olga S. Direct Write of 3D Nanoscale Mesh Objects with Platinum Precursor via Focused Helium Ion Beam Induced Deposition |
title | Direct Write of 3D Nanoscale Mesh Objects with Platinum Precursor via Focused Helium Ion Beam Induced Deposition |
title_full | Direct Write of 3D Nanoscale Mesh Objects with Platinum Precursor via Focused Helium Ion Beam Induced Deposition |
title_fullStr | Direct Write of 3D Nanoscale Mesh Objects with Platinum Precursor via Focused Helium Ion Beam Induced Deposition |
title_full_unstemmed | Direct Write of 3D Nanoscale Mesh Objects with Platinum Precursor via Focused Helium Ion Beam Induced Deposition |
title_short | Direct Write of 3D Nanoscale Mesh Objects with Platinum Precursor via Focused Helium Ion Beam Induced Deposition |
title_sort | direct write of 3d nanoscale mesh objects with platinum precursor via focused helium ion beam induced deposition |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7281202/ https://www.ncbi.nlm.nih.gov/pubmed/32455865 http://dx.doi.org/10.3390/mi11050527 |
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