Modal Coupling Effect in a Novel Nonlinear Micromechanical Resonator

Capacitive micromechanical resonators share electrodes with the same bias voltage, resulting in the occurrence of electrostatic coupling between intrinsic modes. Unlike the traditional mechanical coupling, the electrostatic coupling is determined by the structural electric potential energy, and gene...

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Detalles Bibliográficos
Autores principales: Lu, Kuo, Li, Qingsong, Zhou, Xin, Song, Guoxiong, Wu, Kai, Zhuo, Ming, Wu, Xuezhong, Xiao, Dingbang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7281384/
https://www.ncbi.nlm.nih.gov/pubmed/32365726
http://dx.doi.org/10.3390/mi11050472

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7281384/
https://www.ncbi.nlm.nih.gov/pubmed/32365726
http://dx.doi.org/10.3390/mi11050472

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