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Modal Coupling Effect in a Novel Nonlinear Micromechanical Resonator

Capacitive micromechanical resonators share electrodes with the same bias voltage, resulting in the occurrence of electrostatic coupling between intrinsic modes. Unlike the traditional mechanical coupling, the electrostatic coupling is determined by the structural electric potential energy, and gene...

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Autores principales: Lu, Kuo, Li, Qingsong, Zhou, Xin, Song, Guoxiong, Wu, Kai, Zhuo, Ming, Wu, Xuezhong, Xiao, Dingbang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7281384/
https://www.ncbi.nlm.nih.gov/pubmed/32365726
http://dx.doi.org/10.3390/mi11050472
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author Lu, Kuo
Li, Qingsong
Zhou, Xin
Song, Guoxiong
Wu, Kai
Zhuo, Ming
Wu, Xuezhong
Xiao, Dingbang
author_facet Lu, Kuo
Li, Qingsong
Zhou, Xin
Song, Guoxiong
Wu, Kai
Zhuo, Ming
Wu, Xuezhong
Xiao, Dingbang
author_sort Lu, Kuo
collection PubMed
description Capacitive micromechanical resonators share electrodes with the same bias voltage, resulting in the occurrence of electrostatic coupling between intrinsic modes. Unlike the traditional mechanical coupling, the electrostatic coupling is determined by the structural electric potential energy, and generally, it only occurs when the coupling modes operate in nonlinear regions. However, previous electrostatic coupling studies mainly focus on the stiffness softening region, with little attention on the opposite stiffness hardening condition. This paper presents a study on the electrostatic modal coupling effect in the stiffness hardening region. A novel capacitive micromechanical resonator with different modal nonlinearities is designed and fabricated. It is demonstrated that activating a cavity mode can shift the fundamental resonance of the manipulated mode by nearly 90 times its mechanical bandwidth. Moreover, the frequency shifting direction is found to be related to the manipulated mode’s nonlinearity, while the frequency hopscotch is determined by the cavity mode’s nonlinearity. The electrostatic coupling has been proven to be an efficient and tunable dynamical coupling with great potential for tuning the frequency in a wide range. The modal coupling theory displayed in this paper is suitable for most capacitive resonators and can be used to improve the resonator’s performance.
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spelling pubmed-72813842020-06-19 Modal Coupling Effect in a Novel Nonlinear Micromechanical Resonator Lu, Kuo Li, Qingsong Zhou, Xin Song, Guoxiong Wu, Kai Zhuo, Ming Wu, Xuezhong Xiao, Dingbang Micromachines (Basel) Article Capacitive micromechanical resonators share electrodes with the same bias voltage, resulting in the occurrence of electrostatic coupling between intrinsic modes. Unlike the traditional mechanical coupling, the electrostatic coupling is determined by the structural electric potential energy, and generally, it only occurs when the coupling modes operate in nonlinear regions. However, previous electrostatic coupling studies mainly focus on the stiffness softening region, with little attention on the opposite stiffness hardening condition. This paper presents a study on the electrostatic modal coupling effect in the stiffness hardening region. A novel capacitive micromechanical resonator with different modal nonlinearities is designed and fabricated. It is demonstrated that activating a cavity mode can shift the fundamental resonance of the manipulated mode by nearly 90 times its mechanical bandwidth. Moreover, the frequency shifting direction is found to be related to the manipulated mode’s nonlinearity, while the frequency hopscotch is determined by the cavity mode’s nonlinearity. The electrostatic coupling has been proven to be an efficient and tunable dynamical coupling with great potential for tuning the frequency in a wide range. The modal coupling theory displayed in this paper is suitable for most capacitive resonators and can be used to improve the resonator’s performance. MDPI 2020-04-29 /pmc/articles/PMC7281384/ /pubmed/32365726 http://dx.doi.org/10.3390/mi11050472 Text en © 2020 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Lu, Kuo
Li, Qingsong
Zhou, Xin
Song, Guoxiong
Wu, Kai
Zhuo, Ming
Wu, Xuezhong
Xiao, Dingbang
Modal Coupling Effect in a Novel Nonlinear Micromechanical Resonator
title Modal Coupling Effect in a Novel Nonlinear Micromechanical Resonator
title_full Modal Coupling Effect in a Novel Nonlinear Micromechanical Resonator
title_fullStr Modal Coupling Effect in a Novel Nonlinear Micromechanical Resonator
title_full_unstemmed Modal Coupling Effect in a Novel Nonlinear Micromechanical Resonator
title_short Modal Coupling Effect in a Novel Nonlinear Micromechanical Resonator
title_sort modal coupling effect in a novel nonlinear micromechanical resonator
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7281384/
https://www.ncbi.nlm.nih.gov/pubmed/32365726
http://dx.doi.org/10.3390/mi11050472
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