Silicon Multi-Pass Gas Cell for Chip-Scale Gas Analysis by Absorption Spectroscopy

Semiconductor and micro-electromechanical system (MEMS) technologies have been already proved as strong solutions for producing miniaturized optical spectrometers, light sources and photodetectors. However, the implementation of optical absorption spectroscopy for in-situ gas analysis requires furth...

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Detalles Bibliográficos
Autores principales: Fathy, Alaa, Sabry, Yasser M., Gnambodoe-Capochichi, Martine, Marty, Frederic, Khalil, Diaa, Bourouina, Tarik
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7281756/
https://www.ncbi.nlm.nih.gov/pubmed/32354147
http://dx.doi.org/10.3390/mi11050463

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7281756/
https://www.ncbi.nlm.nih.gov/pubmed/32354147
http://dx.doi.org/10.3390/mi11050463

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