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Silicon Multi-Pass Gas Cell for Chip-Scale Gas Analysis by Absorption Spectroscopy

Semiconductor and micro-electromechanical system (MEMS) technologies have been already proved as strong solutions for producing miniaturized optical spectrometers, light sources and photodetectors. However, the implementation of optical absorption spectroscopy for in-situ gas analysis requires furth...

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Detalles Bibliográficos
Autores principales:	Fathy, Alaa, Sabry, Yasser M., Gnambodoe-Capochichi, Martine, Marty, Frederic, Khalil, Diaa, Bourouina, Tarik
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2020
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7281756/ https://www.ncbi.nlm.nih.gov/pubmed/32354147 http://dx.doi.org/10.3390/mi11050463

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