Bidirectional Linear Motion by Travelling Waves on Legged Piezoelectric Microfabricated Plates

This paper reports the design, fabrication and performance of MEMS-based piezoelectric bidirectional conveyors featuring 3D printed legs, driven by linear travelling waves (TW). The structures consisted of an aluminium–nitride (AlN) piezoelectric film on top of millimetre-sized rectangular thin sili...

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Detalles Bibliográficos
Autores principales: Ruiz-Díez, Víctor, Hernando-García, Jorge, Toledo, Javier, Ababneh, Abdallah, Seidel, Helmut, Sánchez-Rojas, José Luis
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7281763/
https://www.ncbi.nlm.nih.gov/pubmed/32443680
http://dx.doi.org/10.3390/mi11050517

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7281763/
https://www.ncbi.nlm.nih.gov/pubmed/32443680
http://dx.doi.org/10.3390/mi11050517

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