Towards fully integrated photonic displacement sensors

The field of optical metrology with its high precision position, rotation and wavefront sensors represents the basis for lithography and high resolution microscopy. However, the on-chip integration—a task highly relevant for future nanotechnological devices—necessitates the reduction of the spatial...

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Detalles Bibliográficos
Autores principales: Bag, Ankan, Neugebauer, Martin, Mick, Uwe, Christiansen, Silke, Schulz, Sebastian A., Banzer, Peter
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7283363/
https://www.ncbi.nlm.nih.gov/pubmed/32518320
http://dx.doi.org/10.1038/s41467-020-16739-y

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7283363/
https://www.ncbi.nlm.nih.gov/pubmed/32518320
http://dx.doi.org/10.1038/s41467-020-16739-y

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