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Towards fully integrated photonic displacement sensors
The field of optical metrology with its high precision position, rotation and wavefront sensors represents the basis for lithography and high resolution microscopy. However, the on-chip integration—a task highly relevant for future nanotechnological devices—necessitates the reduction of the spatial...
| Autores principales: | , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2020
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7283363/ https://www.ncbi.nlm.nih.gov/pubmed/32518320 http://dx.doi.org/10.1038/s41467-020-16739-y |