Design of a Tri-Axial Surface Micromachined MEMS Vibrating Gyroscope

Gyroscopes are one of the next killer applications for the MEMS (Micro-Electro-Mechanical-Systems) sensors industry. Many mature applications have already been developed and produced in limited volumes for the automotive, consumer, industrial, medical, and military markets. Plenty of high-volume app...

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Detalles Bibliográficos
Autores principales: Crescenzi, Rocco, Castellito, Giuseppe Vincenzo, Quaranta, Simone, Balucani, Marco
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7284569/
https://www.ncbi.nlm.nih.gov/pubmed/32429296
http://dx.doi.org/10.3390/s20102822

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7284569/
https://www.ncbi.nlm.nih.gov/pubmed/32429296
http://dx.doi.org/10.3390/s20102822

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