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Design of a Tri-Axial Surface Micromachined MEMS Vibrating Gyroscope
Gyroscopes are one of the next killer applications for the MEMS (Micro-Electro-Mechanical-Systems) sensors industry. Many mature applications have already been developed and produced in limited volumes for the automotive, consumer, industrial, medical, and military markets. Plenty of high-volume app...
Autores principales: | Crescenzi, Rocco, Castellito, Giuseppe Vincenzo, Quaranta, Simone, Balucani, Marco |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2020
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7284569/ https://www.ncbi.nlm.nih.gov/pubmed/32429296 http://dx.doi.org/10.3390/s20102822 |
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