Dataset for TiN Thin Films Prepared by Plasma-Enhanced Atomic Layer Deposition Using Tetrakis(dimethylamino)titanium (TDMAT) and Titanium Tetrachloride (TiCl(4)) Precursor

A dataset in this report is regarding an article “Ultrathin Effective TiN Protective Films Prepared by Plasma-Enhanced Atomic Layer Deposition for High Performance Metallic Bipolar Plates of Polymer Electrolyte Membrane Fuel Cells” [1]. TiN (Titanium Nitride) thin films were deposited by Plasma-Enha...

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Detalles Bibliográficos
Autores principales: Lee, Woo-Jae, Yun, Eun-Young, Lee, Han-Bo-Ram, Hong, Suck Won, Kwon, Se-Hun
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Elsevier 2020
Materias:
Materials Science
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7287241/
https://www.ncbi.nlm.nih.gov/pubmed/32551348
http://dx.doi.org/10.1016/j.dib.2020.105777

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7287241/
https://www.ncbi.nlm.nih.gov/pubmed/32551348
http://dx.doi.org/10.1016/j.dib.2020.105777

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