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Output of MEMS Piezoelectric Energy Harvester of Double-Clamped Beams with Different Width Shapes

For a microelectromechanical system (MEMS) piezoelectric energy harvester consisting of double-clamped beams, the effects of both beam shape and electrode arrangement on the voltage outputs are analyzed. For two kinds of harvester structures including millimeter-scale and micro-scale, and different...

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Detalles Bibliográficos
Autores principales: Jin, Lei, Gao, Shiqiao, Zhang, Xiyang, Wu, Qinghe
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7287982/
https://www.ncbi.nlm.nih.gov/pubmed/32438668
http://dx.doi.org/10.3390/ma13102330