Output of MEMS Piezoelectric Energy Harvester of Double-Clamped Beams with Different Width Shapes

For a microelectromechanical system (MEMS) piezoelectric energy harvester consisting of double-clamped beams, the effects of both beam shape and electrode arrangement on the voltage outputs are analyzed. For two kinds of harvester structures including millimeter-scale and micro-scale, and different...

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Detalles Bibliográficos
Autores principales: Jin, Lei, Gao, Shiqiao, Zhang, Xiyang, Wu, Qinghe
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7287982/
https://www.ncbi.nlm.nih.gov/pubmed/32438668
http://dx.doi.org/10.3390/ma13102330
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author Jin, Lei
Gao, Shiqiao
Zhang, Xiyang
Wu, Qinghe
author_facet Jin, Lei
Gao, Shiqiao
Zhang, Xiyang
Wu, Qinghe
author_sort Jin, Lei
collection PubMed
description For a microelectromechanical system (MEMS) piezoelectric energy harvester consisting of double-clamped beams, the effects of both beam shape and electrode arrangement on the voltage outputs are analyzed. For two kinds of harvester structures including millimeter-scale and micro-scale, and different shapes including rectangular, segmentally trapezoidal and concave parabolic are taken into account. Corresponding electric outputs are calculated and tested. Their results are in good agreement with each other. The experimental results validate the theoretical analysis.
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spelling pubmed-72879822020-06-15 Output of MEMS Piezoelectric Energy Harvester of Double-Clamped Beams with Different Width Shapes Jin, Lei Gao, Shiqiao Zhang, Xiyang Wu, Qinghe Materials (Basel) Article For a microelectromechanical system (MEMS) piezoelectric energy harvester consisting of double-clamped beams, the effects of both beam shape and electrode arrangement on the voltage outputs are analyzed. For two kinds of harvester structures including millimeter-scale and micro-scale, and different shapes including rectangular, segmentally trapezoidal and concave parabolic are taken into account. Corresponding electric outputs are calculated and tested. Their results are in good agreement with each other. The experimental results validate the theoretical analysis. MDPI 2020-05-19 /pmc/articles/PMC7287982/ /pubmed/32438668 http://dx.doi.org/10.3390/ma13102330 Text en © 2020 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Jin, Lei
Gao, Shiqiao
Zhang, Xiyang
Wu, Qinghe
Output of MEMS Piezoelectric Energy Harvester of Double-Clamped Beams with Different Width Shapes
title Output of MEMS Piezoelectric Energy Harvester of Double-Clamped Beams with Different Width Shapes
title_full Output of MEMS Piezoelectric Energy Harvester of Double-Clamped Beams with Different Width Shapes
title_fullStr Output of MEMS Piezoelectric Energy Harvester of Double-Clamped Beams with Different Width Shapes
title_full_unstemmed Output of MEMS Piezoelectric Energy Harvester of Double-Clamped Beams with Different Width Shapes
title_short Output of MEMS Piezoelectric Energy Harvester of Double-Clamped Beams with Different Width Shapes
title_sort output of mems piezoelectric energy harvester of double-clamped beams with different width shapes
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7287982/
https://www.ncbi.nlm.nih.gov/pubmed/32438668
http://dx.doi.org/10.3390/ma13102330
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AT wuqinghe outputofmemspiezoelectricenergyharvesterofdoubleclampedbeamswithdifferentwidthshapes

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