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Output of MEMS Piezoelectric Energy Harvester of Double-Clamped Beams with Different Width Shapes
For a microelectromechanical system (MEMS) piezoelectric energy harvester consisting of double-clamped beams, the effects of both beam shape and electrode arrangement on the voltage outputs are analyzed. For two kinds of harvester structures including millimeter-scale and micro-scale, and different...
Autores principales: | Jin, Lei, Gao, Shiqiao, Zhang, Xiyang, Wu, Qinghe |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2020
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7287982/ https://www.ncbi.nlm.nih.gov/pubmed/32438668 http://dx.doi.org/10.3390/ma13102330 |
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