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InAs/GaAs Quantum Dot Microlasers Formed on Silicon Using Monolithic and Hybrid Integration Methods
An InAs/InGaAs quantum dot laser with a heterostructure epitaxially grown on a silicon substrate was used to fabricate injection microdisk lasers of different diameters (15–31 µm). A post-growth process includes photolithography and deep dry etching. No surface protection/passivation is applied. The...
Autores principales: | Zhukov, Alexey E., Kryzhanovskaya, Natalia V., Moiseev, Eduard I., Dragunova, Anna S., Tang, Mingchu, Chen, Siming, Liu, Huiyun, Kulagina, Marina M., Kadinskaya, Svetlana A., Zubov, Fedor I., Mozharov, Alexey M., Maximov, Mikhail V. |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2020
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7287998/ https://www.ncbi.nlm.nih.gov/pubmed/32443456 http://dx.doi.org/10.3390/ma13102315 |
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