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Nanoindentation dataset of silicon and hafnia doped silicon coatings produced by magnetron sputtering

Mechanical properties of three different coatings comprising of pure silicon, 36 mol% HfO(2)-doped silicon and 60 mol% HfO(2)-doped silicon on SiC substrate material were obtained by nanoindentation. The coatings aim at oxidation protective layers in environmental barrier coating systems for SiC/SiC...

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Detalles Bibliográficos
Autores principales: Anton, Ronja, Leisner, Vito, Schulz, Uwe
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Elsevier 2020
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7306585/
https://www.ncbi.nlm.nih.gov/pubmed/32596423
http://dx.doi.org/10.1016/j.dib.2020.105800