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Nanoindentation dataset of silicon and hafnia doped silicon coatings produced by magnetron sputtering
Mechanical properties of three different coatings comprising of pure silicon, 36 mol% HfO(2)-doped silicon and 60 mol% HfO(2)-doped silicon on SiC substrate material were obtained by nanoindentation. The coatings aim at oxidation protective layers in environmental barrier coating systems for SiC/SiC...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Elsevier
2020
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7306585/ https://www.ncbi.nlm.nih.gov/pubmed/32596423 http://dx.doi.org/10.1016/j.dib.2020.105800 |