Micro-Fabricated Presure Sensor Using 50 nm-Thick of Pd-Based Metallic Glass Freestanding Membrane

This paper reports on micro-fabricated pressure sensors based on a thin metallic glass membrane. The Pd(66)Cu(4)Si(30) metallic glass material is deposited successfully by a sputter technique. An amorphous feature of the deposited film is confirmed by high resolution transmission electron microscopy...

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Detalles Bibliográficos
Autores principales: Van Toan, Nguyen, Tuoi, Truong Thi Kim, Tsai, Yao-Chuan, Lin, Yu-Ching, Ono, Takahito
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7308269/
https://www.ncbi.nlm.nih.gov/pubmed/32572097
http://dx.doi.org/10.1038/s41598-020-67150-y

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7308269/
https://www.ncbi.nlm.nih.gov/pubmed/32572097
http://dx.doi.org/10.1038/s41598-020-67150-y

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