Low Temperature Adhesive Bonding-Based Fabrication of an Air-Borne Flexible Piezoelectric Micromachined Ultrasonic Transducer

This paper presents the development of a flexible piezoelectric micromachined ultrasonic transducer (PMUT) that can conform to flat, concave, and convex surfaces and work in air. The PMUT consists of an Ag-coated polyvinylidene fluoride (PVDF) film mounted onto a laser-manipulated polymer substrate....

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Detalles Bibliográficos
Autores principales: Liu, Wei, Wu, Dawei
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7308851/
https://www.ncbi.nlm.nih.gov/pubmed/32545406
http://dx.doi.org/10.3390/s20113333

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7308851/
https://www.ncbi.nlm.nih.gov/pubmed/32545406
http://dx.doi.org/10.3390/s20113333

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