Enhancement of Withstand Voltage in Silicon Strain Gauges Using a Thin Alkali-Free Glass

We present a cost-effective approach to produce silicon strain gauges that can withstand very high voltage without using any complex package design and without sacrificing any sensor performance. This is achieved by a special silicon strain gauge structure created on an alkali-free glass substrate t...

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Detalles Bibliográficos
Autores principales: Kim, Joon Hyub, Han, Ji-Hoon, Park, Chan Won, Min, Nam Ki
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7308956/
https://www.ncbi.nlm.nih.gov/pubmed/32466606
http://dx.doi.org/10.3390/s20113024

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7308956/
https://www.ncbi.nlm.nih.gov/pubmed/32466606
http://dx.doi.org/10.3390/s20113024

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