Enhanced Infrared Absorbance of the CMOS Compatible Thermopile by the Subwavelength Rectangular-Hole Arrays

The enhanced infrared absorbance (IRA) of the complementary metal-oxide-semiconductor (CMOS) compatible thermopile with the subwavelength rectangular-hole arrays in active area is investigated. The finite-difference time-domain (FDTD) method considered and analyzed the matrix arrangement (MA) and st...

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Detalles Bibliográficos
Autores principales: Chen, Chi-Feng, Shen, Chih-Hsiung, Yeh, Yun-Ying
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Letter
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7309018/
https://www.ncbi.nlm.nih.gov/pubmed/32517094
http://dx.doi.org/10.3390/s20113218

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7309018/
https://www.ncbi.nlm.nih.gov/pubmed/32517094
http://dx.doi.org/10.3390/s20113218

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