Weakly Coupled Piezoelectric MEMS Resonators for Aerosol Sensing

This paper successfully demonstrates the potential of weakly coupled piezoelectric MEMS (Micro-Electro-Mechanical Systems) gravimetric sensors for the detection of ultra-fine particulates. As a proof-of-principle, the detection of diesel soot particles of 100 nanometres or less is demonstrated. A pr...

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Detalles Bibliográficos
Autores principales: Chellasivalingam, Malar, Imran, Hassan, Pandit, Milind, Boies, Adam M., Seshia, Ashwin A.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7309065/
https://www.ncbi.nlm.nih.gov/pubmed/32498465
http://dx.doi.org/10.3390/s20113162

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7309065/
https://www.ncbi.nlm.nih.gov/pubmed/32498465
http://dx.doi.org/10.3390/s20113162

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