Effect of Ion Irradiation Introduced by Focused Ion-Beam Milling on the Mechanical Behaviour of Sub-Micron-Sized Samples

The development of xenon plasma focused ion-beam (Xe(+) PFIB) milling technique enables site-specific sample preparation with milling rates several times larger than the conventional gallium focused ion-beam (Ga(+) FIB) technique. As such, the effect of higher beam currents and the heavier ions util...

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Detalles Bibliográficos
Autores principales: Liu, Jinqiao, Niu, Ranming, Gu, Ji, Cabral, Matthew, Song, Min, Liao, Xiaozhou
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7316792/
https://www.ncbi.nlm.nih.gov/pubmed/32587335
http://dx.doi.org/10.1038/s41598-020-66564-y

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7316792/
https://www.ncbi.nlm.nih.gov/pubmed/32587335
http://dx.doi.org/10.1038/s41598-020-66564-y

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