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Effect of Ion Irradiation Introduced by Focused Ion-Beam Milling on the Mechanical Behaviour of Sub-Micron-Sized Samples
The development of xenon plasma focused ion-beam (Xe(+) PFIB) milling technique enables site-specific sample preparation with milling rates several times larger than the conventional gallium focused ion-beam (Ga(+) FIB) technique. As such, the effect of higher beam currents and the heavier ions util...
| Autores principales: | , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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Nature Publishing Group UK
2020
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7316792/ https://www.ncbi.nlm.nih.gov/pubmed/32587335 http://dx.doi.org/10.1038/s41598-020-66564-y |