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Microfabrication of X-ray Optics by Metal Assisted Chemical Etching: A Review
High-aspect-ratio silicon micro- and nanostructures are technologically relevant in several applications, such as microelectronics, microelectromechanical systems, sensors, thermoelectric materials, battery anodes, solar cells, photonic devices, and X-ray optics. Microfabrication is usually achieved...
| Autores principales: | , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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MDPI
2020
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7344591/ https://www.ncbi.nlm.nih.gov/pubmed/32545633 http://dx.doi.org/10.3390/mi11060589 |