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Refined Calibration Model for Improving the Orientation Precision of Electron Backscatter Diffraction Maps

For the precise determination of orientations in polycrystalline materials, electron backscatter diffraction (EBSD) requires a consistent calibration of the diffraction geometry in the scanning electron microscope (SEM). In the present paper, the variation of the projection center for the Kikuchi di...

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Autores principales: Winkelmann, Aimo, Nolze, Gert, Cios, Grzegorz, Tokarski, Tomasz, Bała, Piotr
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7344741/
https://www.ncbi.nlm.nih.gov/pubmed/32585868
http://dx.doi.org/10.3390/ma13122816
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author Winkelmann, Aimo
Nolze, Gert
Cios, Grzegorz
Tokarski, Tomasz
Bała, Piotr
author_facet Winkelmann, Aimo
Nolze, Gert
Cios, Grzegorz
Tokarski, Tomasz
Bała, Piotr
author_sort Winkelmann, Aimo
collection PubMed
description For the precise determination of orientations in polycrystalline materials, electron backscatter diffraction (EBSD) requires a consistent calibration of the diffraction geometry in the scanning electron microscope (SEM). In the present paper, the variation of the projection center for the Kikuchi diffraction patterns which are measured by EBSD is calibrated using a projective transformation model for the SEM beam scan positions on the sample. Based on a full pattern matching approach between simulated and experimental Kikuchi patterns, individual projection center estimates are determined on a subgrid of the EBSD map, from which least-square fits to affine and projective transformations can be obtained. Reference measurements on single-crystalline silicon are used to quantify the orientation errors which result from different calibration models for the variation of the projection center.
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spelling pubmed-73447412020-07-09 Refined Calibration Model for Improving the Orientation Precision of Electron Backscatter Diffraction Maps Winkelmann, Aimo Nolze, Gert Cios, Grzegorz Tokarski, Tomasz Bała, Piotr Materials (Basel) Article For the precise determination of orientations in polycrystalline materials, electron backscatter diffraction (EBSD) requires a consistent calibration of the diffraction geometry in the scanning electron microscope (SEM). In the present paper, the variation of the projection center for the Kikuchi diffraction patterns which are measured by EBSD is calibrated using a projective transformation model for the SEM beam scan positions on the sample. Based on a full pattern matching approach between simulated and experimental Kikuchi patterns, individual projection center estimates are determined on a subgrid of the EBSD map, from which least-square fits to affine and projective transformations can be obtained. Reference measurements on single-crystalline silicon are used to quantify the orientation errors which result from different calibration models for the variation of the projection center. MDPI 2020-06-23 /pmc/articles/PMC7344741/ /pubmed/32585868 http://dx.doi.org/10.3390/ma13122816 Text en © 2020 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Winkelmann, Aimo
Nolze, Gert
Cios, Grzegorz
Tokarski, Tomasz
Bała, Piotr
Refined Calibration Model for Improving the Orientation Precision of Electron Backscatter Diffraction Maps
title Refined Calibration Model for Improving the Orientation Precision of Electron Backscatter Diffraction Maps
title_full Refined Calibration Model for Improving the Orientation Precision of Electron Backscatter Diffraction Maps
title_fullStr Refined Calibration Model for Improving the Orientation Precision of Electron Backscatter Diffraction Maps
title_full_unstemmed Refined Calibration Model for Improving the Orientation Precision of Electron Backscatter Diffraction Maps
title_short Refined Calibration Model for Improving the Orientation Precision of Electron Backscatter Diffraction Maps
title_sort refined calibration model for improving the orientation precision of electron backscatter diffraction maps
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7344741/
https://www.ncbi.nlm.nih.gov/pubmed/32585868
http://dx.doi.org/10.3390/ma13122816
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