Focused Ion Beam Milling of Single-Crystal Sapphire with A-, C-, and M-Orientations

Sapphire substrates with different crystal orientations are widely used in optoelectronic applications. In this work, focused ion beam (FIB) milling of single-crystal sapphire with A-, C-, and M-orientations was performed. The material removal rate (MRR) and surface roughness (Sa) of sapphire with t...

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Detalles Bibliográficos
Autores principales: Wen, Qiuling, Wei, Xinyu, Jiang, Feng, Lu, Jing, Xu, Xipeng
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7345114/
https://www.ncbi.nlm.nih.gov/pubmed/32604911
http://dx.doi.org/10.3390/ma13122871

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7345114/
https://www.ncbi.nlm.nih.gov/pubmed/32604911
http://dx.doi.org/10.3390/ma13122871

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