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Focused Ion Beam Milling of Single-Crystal Sapphire with A-, C-, and M-Orientations

Sapphire substrates with different crystal orientations are widely used in optoelectronic applications. In this work, focused ion beam (FIB) milling of single-crystal sapphire with A-, C-, and M-orientations was performed. The material removal rate (MRR) and surface roughness (Sa) of sapphire with t...

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Detalles Bibliográficos
Autores principales:	Wen, Qiuling, Wei, Xinyu, Jiang, Feng, Lu, Jing, Xu, Xipeng
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2020
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7345114/ https://www.ncbi.nlm.nih.gov/pubmed/32604911 http://dx.doi.org/10.3390/ma13122871

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