Development of a High-Density Piezoelectric Micromachined Ultrasonic Transducer Array Based on Patterned Aluminum Nitride Thin Film

This study presents the fabrication and characterization of a piezoelectric micromachined ultrasonic transducer (pMUT; radius: 40 µm) using a patterned aluminum nitride (AlN) thin film as the active piezoelectric material. A 20 × 20 array of pMUTs using a 1 µm thick AlN thin film was designed and fa...

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Detalles Bibliográficos
Autores principales: Shin, Eunjung, Yeo, Hong Goo, Yeon, Ara, Jin, Changzhu, Park, Wonki, Lee, Sung-Chul, Choi, Hongsoo
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7345422/
https://www.ncbi.nlm.nih.gov/pubmed/32604827
http://dx.doi.org/10.3390/mi11060623

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7345422/
https://www.ncbi.nlm.nih.gov/pubmed/32604827
http://dx.doi.org/10.3390/mi11060623

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