Effect of the Al(2)O(3) Deposition Method on Parylene C: Highlights on a Nanopillar-Shaped Surface

[Image: see text] Parylene C (PC) has attracted tremendous attention throughout the past few years due to its extraordinary properties such as high mechanical strength and biocompatibility. When used as a flexible substrate and combined with high-κ dielectrics such as aluminum oxide (Al(2)O(3)), the...

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Detalles Bibliográficos
Autores principales: Njeim, Joanna, Alamarguy, David, Tu, Xiaolong, Durnez, Alan, Lafosse, Xavier, Chretien, Pascal, Madouri, Ali, Ren, Zhuoxiang, Brunel, David
Formato: Online Artículo Texto
Lenguaje:English
Publicado: American Chemical Society 2020
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7345438/
https://www.ncbi.nlm.nih.gov/pubmed/32656403
http://dx.doi.org/10.1021/acsomega.0c00735

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7345438/
https://www.ncbi.nlm.nih.gov/pubmed/32656403
http://dx.doi.org/10.1021/acsomega.0c00735

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