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Effect of the Al(2)O(3) Deposition Method on Parylene C: Highlights on a Nanopillar-Shaped Surface
[Image: see text] Parylene C (PC) has attracted tremendous attention throughout the past few years due to its extraordinary properties such as high mechanical strength and biocompatibility. When used as a flexible substrate and combined with high-κ dielectrics such as aluminum oxide (Al(2)O(3)), the...
| Autores principales: | , , , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
American Chemical Society
2020
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7345438/ https://www.ncbi.nlm.nih.gov/pubmed/32656403 http://dx.doi.org/10.1021/acsomega.0c00735 |