The Relationships of Microscopic Evolution to Resistivity Variation of a FIB-Deposited Platinum Interconnector

Depositing platinum (Pt) interconnectors during the sample preparation process via a focused ion beam (FIB) system is an inescapable procedure for in situ transmission electron microscopy (TEM) investigations. To achieve good electrical contact and avoid irreversible damage in practical samples, the...

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Detalles Bibliográficos
Autores principales: Zhong, Chaorong, Qi, Ruijuan, Zheng, Yonghui, Cheng, Yan, Song, Wenxiong, Huang, Rong
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7345480/
https://www.ncbi.nlm.nih.gov/pubmed/32545476
http://dx.doi.org/10.3390/mi11060588

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7345480/
https://www.ncbi.nlm.nih.gov/pubmed/32545476
http://dx.doi.org/10.3390/mi11060588

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