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The Relationships of Microscopic Evolution to Resistivity Variation of a FIB-Deposited Platinum Interconnector
Depositing platinum (Pt) interconnectors during the sample preparation process via a focused ion beam (FIB) system is an inescapable procedure for in situ transmission electron microscopy (TEM) investigations. To achieve good electrical contact and avoid irreversible damage in practical samples, the...
| Autores principales: | , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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MDPI
2020
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7345480/ https://www.ncbi.nlm.nih.gov/pubmed/32545476 http://dx.doi.org/10.3390/mi11060588 |