A Novel Miniature and Selective CMOS Gas Sensor for Gas Mixture Analysis—Part 2: Emphasis on Physical Aspects

This is a second part of the paper presenting a miniature, combustion-type gas sensor (dubbed GMOS) based on a novel thermal sensor (dubbed TMOS). The TMOS is a micromachined CMOS-SOI transistor, which acts as the sensing element and is integrated with a catalytic reaction plate, where ignition of t...

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Detalles Bibliográficos
Autores principales: Avraham, Moshe, Stolyarova, Sara, Blank, Tanya, Bar-Lev, Sharon, Golan, Gady, Nemirovsky, Yael
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7345983/
https://www.ncbi.nlm.nih.gov/pubmed/32545417
http://dx.doi.org/10.3390/mi11060587

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7345983/
https://www.ncbi.nlm.nih.gov/pubmed/32545417
http://dx.doi.org/10.3390/mi11060587

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