Selective Ultrasonic Gravimetric Sensors Based on Capacitive Micromachined Ultrasound Transducer Structure—A Review

This review paper discusses the advances of the gravimetric detection devices based on capacitive micromachined ultrasound transducers structure. Principles of gravimetric operation and device modeling are reviewed through the presentation of an analytical, one-dimensional model and finite element m...

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Detalles Bibliográficos
Autores principales: Barauskas, Dovydas, Dzikaras, Mindaugas, Bieliauskas, Dovydas, Pelenis, Donatas, Vanagas, Gailius, Viržonis, Darius
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Review
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7349875/
https://www.ncbi.nlm.nih.gov/pubmed/32585954
http://dx.doi.org/10.3390/s20123554

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7349875/
https://www.ncbi.nlm.nih.gov/pubmed/32585954
http://dx.doi.org/10.3390/s20123554

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