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A Comprehensive Study on the Effect of TiN Top and Bottom Electrodes on Atomic Layer Deposited Ferroelectric Hf(0.5)Zr(0.5)O(2) Thin Films
The discovery of ferroelectricity in HfO(2)-based materials in 2011 provided new research directions and opportunities. In particular, for atomic layer deposited Hf(0.5)Zr(0.5)O(2) (HZO) films, it is possible to obtain homogenous thin films with satisfactory ferroelectric properties at a low thermal...
Autores principales: | , , , , , , , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2020
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7372450/ https://www.ncbi.nlm.nih.gov/pubmed/32630791 http://dx.doi.org/10.3390/ma13132968 |