A Capacitive MEMS Inclinometer Sensor with Wide Dynamic Range and Improved Sensitivity

This paper proposes a novel capacitive liquid metal microelectromechanical system (MEMS) inclinometer sensor and introduces its design, fabrication, and signal measurement. The sensor was constructed using three-layer substrates. A conductive liquid droplet was rolled along an annular groove of the...

Descripción completa

Detalles Bibliográficos
Autores principales: Xu, HanYang, Zhao, Yulong, Zhang, Kai, Jiang, Kyle
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7374376/
https://www.ncbi.nlm.nih.gov/pubmed/32630795
http://dx.doi.org/10.3390/s20133711

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7374376/
https://www.ncbi.nlm.nih.gov/pubmed/32630795
http://dx.doi.org/10.3390/s20133711

Ejemplares similares