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A Capacitive MEMS Inclinometer Sensor with Wide Dynamic Range and Improved Sensitivity
This paper proposes a novel capacitive liquid metal microelectromechanical system (MEMS) inclinometer sensor and introduces its design, fabrication, and signal measurement. The sensor was constructed using three-layer substrates. A conductive liquid droplet was rolled along an annular groove of the...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2020
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7374376/ https://www.ncbi.nlm.nih.gov/pubmed/32630795 http://dx.doi.org/10.3390/s20133711 |