An Integrated Gold-Film Temperature Sensor for In Situ Temperature Measurement of a High-Precision MEMS Accelerometer

Temperature sensors are one of the most important types of sensors, and are employed in many applications, including consumer electronics, automobiles and environmental monitoring. Due to the need to simultaneously measure temperature and other physical quantities, it is often desirable to integrate...

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Detalles Bibliográficos
Autores principales: Song, Xiaoxiao, Liu, Huafeng, Fang, Yanyan, Zhao, Chun, Qu, Ziqiang, Wang, Qiu, Tu, Liang-Cheng
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Letter
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7374507/
https://www.ncbi.nlm.nih.gov/pubmed/32610636
http://dx.doi.org/10.3390/s20133652

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7374507/
https://www.ncbi.nlm.nih.gov/pubmed/32610636
http://dx.doi.org/10.3390/s20133652

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