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An Integrated Gold-Film Temperature Sensor for In Situ Temperature Measurement of a High-Precision MEMS Accelerometer

Temperature sensors are one of the most important types of sensors, and are employed in many applications, including consumer electronics, automobiles and environmental monitoring. Due to the need to simultaneously measure temperature and other physical quantities, it is often desirable to integrate...

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Detalles Bibliográficos
Autores principales: Song, Xiaoxiao, Liu, Huafeng, Fang, Yanyan, Zhao, Chun, Qu, Ziqiang, Wang, Qiu, Tu, Liang-Cheng
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7374507/
https://www.ncbi.nlm.nih.gov/pubmed/32610636
http://dx.doi.org/10.3390/s20133652
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author Song, Xiaoxiao
Liu, Huafeng
Fang, Yanyan
Zhao, Chun
Qu, Ziqiang
Wang, Qiu
Tu, Liang-Cheng
author_facet Song, Xiaoxiao
Liu, Huafeng
Fang, Yanyan
Zhao, Chun
Qu, Ziqiang
Wang, Qiu
Tu, Liang-Cheng
author_sort Song, Xiaoxiao
collection PubMed
description Temperature sensors are one of the most important types of sensors, and are employed in many applications, including consumer electronics, automobiles and environmental monitoring. Due to the need to simultaneously measure temperature and other physical quantities, it is often desirable to integrate temperature sensors with other physical sensors, including accelerometers. In this study, we introduce an integrated gold-film resistor-type temperature sensor for in situ temperature measurement of a high-precision MEMS accelerometer. Gold was chosen as the material of the temperature sensor, for both its great resistance to oxidation and its better compatibility with our in-house capacitive accelerometer micro-fabrication process. The proposed temperature sensor was first calibrated and then evaluated. Experimental results showed the temperature measurement accuracy to be 0.08 °C; the discrepancies among the sensors were within 0.02 °C; the repeatability within seven days was 0.03 °C; the noise floor was 1 mK/√Hz@0.01 Hz and 100 μK/√Hz@0.5 Hz. The integration test with a MEMS accelerometer showed that by subtracting the temperature effect, the bias stability within 46 h for the accelerometer could be improved from 2.15 μg to 640 ng. This demonstrates the capability of measuring temperature in situ with the potential to eliminate the temperature effects of the MEMS accelerometer through system-level compensation.
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spelling pubmed-73745072020-08-05 An Integrated Gold-Film Temperature Sensor for In Situ Temperature Measurement of a High-Precision MEMS Accelerometer Song, Xiaoxiao Liu, Huafeng Fang, Yanyan Zhao, Chun Qu, Ziqiang Wang, Qiu Tu, Liang-Cheng Sensors (Basel) Letter Temperature sensors are one of the most important types of sensors, and are employed in many applications, including consumer electronics, automobiles and environmental monitoring. Due to the need to simultaneously measure temperature and other physical quantities, it is often desirable to integrate temperature sensors with other physical sensors, including accelerometers. In this study, we introduce an integrated gold-film resistor-type temperature sensor for in situ temperature measurement of a high-precision MEMS accelerometer. Gold was chosen as the material of the temperature sensor, for both its great resistance to oxidation and its better compatibility with our in-house capacitive accelerometer micro-fabrication process. The proposed temperature sensor was first calibrated and then evaluated. Experimental results showed the temperature measurement accuracy to be 0.08 °C; the discrepancies among the sensors were within 0.02 °C; the repeatability within seven days was 0.03 °C; the noise floor was 1 mK/√Hz@0.01 Hz and 100 μK/√Hz@0.5 Hz. The integration test with a MEMS accelerometer showed that by subtracting the temperature effect, the bias stability within 46 h for the accelerometer could be improved from 2.15 μg to 640 ng. This demonstrates the capability of measuring temperature in situ with the potential to eliminate the temperature effects of the MEMS accelerometer through system-level compensation. MDPI 2020-06-29 /pmc/articles/PMC7374507/ /pubmed/32610636 http://dx.doi.org/10.3390/s20133652 Text en © 2020 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
spellingShingle Letter
Song, Xiaoxiao
Liu, Huafeng
Fang, Yanyan
Zhao, Chun
Qu, Ziqiang
Wang, Qiu
Tu, Liang-Cheng
An Integrated Gold-Film Temperature Sensor for In Situ Temperature Measurement of a High-Precision MEMS Accelerometer
title An Integrated Gold-Film Temperature Sensor for In Situ Temperature Measurement of a High-Precision MEMS Accelerometer
title_full An Integrated Gold-Film Temperature Sensor for In Situ Temperature Measurement of a High-Precision MEMS Accelerometer
title_fullStr An Integrated Gold-Film Temperature Sensor for In Situ Temperature Measurement of a High-Precision MEMS Accelerometer
title_full_unstemmed An Integrated Gold-Film Temperature Sensor for In Situ Temperature Measurement of a High-Precision MEMS Accelerometer
title_short An Integrated Gold-Film Temperature Sensor for In Situ Temperature Measurement of a High-Precision MEMS Accelerometer
title_sort integrated gold-film temperature sensor for in situ temperature measurement of a high-precision mems accelerometer
topic Letter
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7374507/
https://www.ncbi.nlm.nih.gov/pubmed/32610636
http://dx.doi.org/10.3390/s20133652
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