Simple Device to Measure Pressure Using the Stress Impedance Effect of Amorphous Soft Magnetic Thin Film

A simple micro-machined pressure sensor, based on the stress-impedance (SI) effect, was fabricated herein using typical micro-fabrication technologies. To sense pressure, a 1-µm thin, soft magnetic metallic film of FeSiB was sputtered and used as a diaphragm. Its electrical response (impedance chang...

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Detalles Bibliográficos
Autores principales: Froemel, Joerg, Akita, Satoru, Tanaka, Shuji
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7407212/
https://www.ncbi.nlm.nih.gov/pubmed/32629856
http://dx.doi.org/10.3390/mi11070649

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7407212/
https://www.ncbi.nlm.nih.gov/pubmed/32629856
http://dx.doi.org/10.3390/mi11070649

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