Cargando…

Simple Device to Measure Pressure Using the Stress Impedance Effect of Amorphous Soft Magnetic Thin Film

A simple micro-machined pressure sensor, based on the stress-impedance (SI) effect, was fabricated herein using typical micro-fabrication technologies. To sense pressure, a 1-µm thin, soft magnetic metallic film of FeSiB was sputtered and used as a diaphragm. Its electrical response (impedance chang...

Descripción completa

Detalles Bibliográficos
Autores principales: Froemel, Joerg, Akita, Satoru, Tanaka, Shuji
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7407212/
https://www.ncbi.nlm.nih.gov/pubmed/32629856
http://dx.doi.org/10.3390/mi11070649
_version_ 1783567574320021504
author Froemel, Joerg
Akita, Satoru
Tanaka, Shuji
author_facet Froemel, Joerg
Akita, Satoru
Tanaka, Shuji
author_sort Froemel, Joerg
collection PubMed
description A simple micro-machined pressure sensor, based on the stress-impedance (SI) effect, was fabricated herein using typical micro-fabrication technologies. To sense pressure, a 1-µm thin, soft magnetic metallic film of FeSiB was sputtered and used as a diaphragm. Its electrical response (impedance change) was measured under pressure in a frequency band from 5 to 500 MHz. A lumped-element equivalent electric circuit was used to separate the impedance of the soft magnetic metal from other parasitic elements. The impedance change clearly depended on the applied pressure. It was also shown that the impedance change could be explained by a change in relative permeability, according to the theory of the SI effect. The radial stress in the diaphragm and the relative permeability exhibited a linear relationship. At a measurement frequency of 200 MHz, the largest sensor response, with a gauge factor of 385.7, was found. It was in the same order as the conventional sensors. As the proposed device is very simple, it has the potential for application as a cheap pressure sensor.
format Online
Article
Text
id pubmed-7407212
institution National Center for Biotechnology Information
language English
publishDate 2020
publisher MDPI
record_format MEDLINE/PubMed
spelling pubmed-74072122020-08-11 Simple Device to Measure Pressure Using the Stress Impedance Effect of Amorphous Soft Magnetic Thin Film Froemel, Joerg Akita, Satoru Tanaka, Shuji Micromachines (Basel) Article A simple micro-machined pressure sensor, based on the stress-impedance (SI) effect, was fabricated herein using typical micro-fabrication technologies. To sense pressure, a 1-µm thin, soft magnetic metallic film of FeSiB was sputtered and used as a diaphragm. Its electrical response (impedance change) was measured under pressure in a frequency band from 5 to 500 MHz. A lumped-element equivalent electric circuit was used to separate the impedance of the soft magnetic metal from other parasitic elements. The impedance change clearly depended on the applied pressure. It was also shown that the impedance change could be explained by a change in relative permeability, according to the theory of the SI effect. The radial stress in the diaphragm and the relative permeability exhibited a linear relationship. At a measurement frequency of 200 MHz, the largest sensor response, with a gauge factor of 385.7, was found. It was in the same order as the conventional sensors. As the proposed device is very simple, it has the potential for application as a cheap pressure sensor. MDPI 2020-06-30 /pmc/articles/PMC7407212/ /pubmed/32629856 http://dx.doi.org/10.3390/mi11070649 Text en © 2020 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Froemel, Joerg
Akita, Satoru
Tanaka, Shuji
Simple Device to Measure Pressure Using the Stress Impedance Effect of Amorphous Soft Magnetic Thin Film
title Simple Device to Measure Pressure Using the Stress Impedance Effect of Amorphous Soft Magnetic Thin Film
title_full Simple Device to Measure Pressure Using the Stress Impedance Effect of Amorphous Soft Magnetic Thin Film
title_fullStr Simple Device to Measure Pressure Using the Stress Impedance Effect of Amorphous Soft Magnetic Thin Film
title_full_unstemmed Simple Device to Measure Pressure Using the Stress Impedance Effect of Amorphous Soft Magnetic Thin Film
title_short Simple Device to Measure Pressure Using the Stress Impedance Effect of Amorphous Soft Magnetic Thin Film
title_sort simple device to measure pressure using the stress impedance effect of amorphous soft magnetic thin film
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7407212/
https://www.ncbi.nlm.nih.gov/pubmed/32629856
http://dx.doi.org/10.3390/mi11070649
work_keys_str_mv AT froemeljoerg simpledevicetomeasurepressureusingthestressimpedanceeffectofamorphoussoftmagneticthinfilm
AT akitasatoru simpledevicetomeasurepressureusingthestressimpedanceeffectofamorphoussoftmagneticthinfilm
AT tanakashuji simpledevicetomeasurepressureusingthestressimpedanceeffectofamorphoussoftmagneticthinfilm