Plasma-Assisted Chemical Vapor Deposition of F-Doped MnO(2) Nanostructures on Single Crystal Substrates

MnO(2) nanostructures were fabricated by plasma assisted-chemical vapor deposition (PA-CVD) using a fluorinated diketonate diamine manganese complex, acting as single-source precursor for both Mn and F. The syntheses were performed from Ar/O(2) plasmas on MgAl(2)O(4)(100), YAlO(3)(010), and Y(3)Al(5...

Descripción completa

Detalles Bibliográficos
Autores principales: Bigiani, Lorenzo, Maccato, Chiara, Gasparotto, Alberto, Sada, Cinzia, Bontempi, Elza, Barreca, Davide
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7407531/
https://www.ncbi.nlm.nih.gov/pubmed/32650613
http://dx.doi.org/10.3390/nano10071335

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7407531/
https://www.ncbi.nlm.nih.gov/pubmed/32650613
http://dx.doi.org/10.3390/nano10071335

Ejemplares similares