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Plasma-Assisted Chemical Vapor Deposition of F-Doped MnO(2) Nanostructures on Single Crystal Substrates

MnO(2) nanostructures were fabricated by plasma assisted-chemical vapor deposition (PA-CVD) using a fluorinated diketonate diamine manganese complex, acting as single-source precursor for both Mn and F. The syntheses were performed from Ar/O(2) plasmas on MgAl(2)O(4)(100), YAlO(3)(010), and Y(3)Al(5...

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Detalles Bibliográficos
Autores principales:	Bigiani, Lorenzo, Maccato, Chiara, Gasparotto, Alberto, Sada, Cinzia, Bontempi, Elza, Barreca, Davide
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2020
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7407531/ https://www.ncbi.nlm.nih.gov/pubmed/32650613 http://dx.doi.org/10.3390/nano10071335

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