Low-Cost PVD Shadow Masks with Submillimeter Resolution from Laser-Cut Paper

We characterize an affordable method of producing stencils for submillimeter physical vapor deposition (PVD) by using paper and a benchtop laser cutter. Patterning electrodes or similar features on top of organic or biological substrates is generally not possible using standard photolithography. Sha...

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Detalles Bibliográficos
Autores principales: Elhami Nik, Farzad, Matthiesen, Isabelle, Herland, Anna, Winkler, Thomas E.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2020
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7407583/
https://www.ncbi.nlm.nih.gov/pubmed/32664500
http://dx.doi.org/10.3390/mi11070676

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7407583/
https://www.ncbi.nlm.nih.gov/pubmed/32664500
http://dx.doi.org/10.3390/mi11070676

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